Equipment name: 6-inch manual probe station

Device model: MPS150

Vacuum running platform: 155mm x 155mm 3μm +/- 60° 70mm

Standard platform: 155mm x 155mm 2μm +45°(CCW) , -90°(CW) 250mm

Fast running platform: 155mm x 155mm 1μm +45°(CCW) , -90°(CW) 275mm

Ideal for: Device and Wafer Characterization (DWC), Failure Analysis (FA), Submicron Probing, MEMS and Optical Engineering Measurements