Equipment name: tungsten lamp scanning electron microscope

Device model: TESCAN VEGA3

Magnification: 2~1,000,000x

Resolution: High Vacuum (SE): 3 nm @ 30 kV / 2 nm @ 30 kV; 8 nm @ 3 kV / 5 nm @ 3 kV

Low Vacuum Mode (LVSTD, BSE): 3.5 nm @ 30 kV / 2.5 nm @ 30 kV